| Parameter | 9-Inch Half-Wafer Specification | 9-Inch Full-Wafer Specification |
| waves（λ） | 365/405nm | 365/405nm |
| Effective Area | 230x120mm2 | 230x230mm2 |
| Irradiance | 10-110mw/cm2&365nm 20-160mw/cm2&405nm | 10-110mw/cm2&365nm 20-160mw/cm2&405nm |
| Non-uniformity | ≤3% | ≤3% |
| Working Distance | 350mm(Compatible with 300-400mm) | 240mm(Compatible with 220-300mm) |
| Size | 550x280x678mm（LxWxH） | 685x660x800mm（LxWxH） |
| Application Fields | Photovoltaic Solar Silicon Wafer Exposure | Photovoltaic Solar Silicon Wafer Exposure |
